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Anton S. Bukatin
Anton S. Bukatin
Saint Petersburg Academic University
Atomic layer deposition
Silicon
Inorganic chemistry
Amorphous solid
Microcrystalline
3
Papers
15
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Low temperature plasma enhanced deposition of GaP films on Si substrate
2018
Journal of Vacuum Science and Technology
Alexander S. Gudovskikh
I.A. Morozov
Alexander V. Uvarov
Dmitriy A. Kudryashov
E. V. Nikitina
Anton S. Bukatin
Vladimir N. Nevedomskiy
Jean-Paul Kleider
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Citations (11)
Low temperature plasma enhanced deposition approach for fabrication of microcrystalline GaP/Si superlattice
2018
Journal of Vacuum Science and Technology
Alexander S. Gudovskikh
Alexander V. Uvarov
I.A. Morozov
A I Baranov
Dmitriy A. Kudryashov
Kirill S. Zelentsov
Anton S. Bukatin
Konstantin P. Kotlyar
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Citations (4)
Atomic layer deposition of gallium phosphide for silicon based photovoltaics
2016
A. S. Gudovskikh
I.A. Morozov
D. A. Kudryashov
E. V. Nikitina
Anton S. Bukatin
Jean-Paul Kleider
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