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M. Gaukroger
M. Gaukroger
Microelectromechanical systems
Optoelectronics
Laser
Materials science
Metrology
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Recent Breakthroughs in Tight Pitch Laser Microdrilling for Mems Guide Plates
2019
A Ferguson
M. Gaukroger
D. Karnakis
M Cullimore
R Geremia
S Tuohy
E. Pelletier
Nuno Braz
G Harris
A.J. Kearsley
M. Knowles
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