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Chuan-Hui Shen

National Chiao Tung University

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Nitride Induced Stress Affecting Crystallinity of Sidewall Damascene Gate-All-Around Nanowire Poly-Si FETs

2020 IEEE Transactions on Nanotechnology
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Crystallinity Effect on Reliability of Sidewall Damascened Nanowire Poly-Si GAA FETs

2020 SNW | IEEE Silicon Nanoelectronics Workshop
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