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Tim Limmer
Tim Limmer
Materials science
Optoelectronics
Silicon
Lithography
Thin film
4
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Defect mitigation and characterization in silicon hardmask materials
2020
Vineet Alexander
Shyam Paudel
Glenn Dado
Lucia D'Urzo
Virgil Briggs
Mona Bavarian
Rao Varanasi
Tim Limmer
Nick Brakensiek
Levi Gildehaus
Michael Mesawich
Douglas Guerrero
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Are surfaces of silicon hardmasks adaptive
2020
Xianggui (Shawn) Ye
Joyce Lowes
Zhimin Zhu
Richard Daugherty
Zhiqiang Fan
James Lamb
Tim Limmer
Srikanth Kommu
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Rigorous vase data fitting for ultrathin films
2020
Zhimin Zhu
Joyce Lowes
Shawn Ye
Zhiqiang Fan
Darin Collins
James Lamb
Tim Limmer
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Thin film characterization for advanced patterning
2019
Zhimin Zhu
Xianggui Ye
Sean Simmons
Catherine Frank
Tim Limmer
James Lamb
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