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Xidong Chen

University of Illinois at Urbana–Champaign

3

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Nano-electromechanical Oscillators (NEMOs) for RF Technologies

2004
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Dramatic effect of postoxidation annealing on (100) Si/SiO2 roughness

1997 Applied Physics Letters
- Xidong Chen
- J. M. Gibson
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TEM Studies of Interface Structure of Si/SiO2

1996
- Xidong Chen
- J. Murray Gibson
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