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Joost Moonen
Joost Moonen
Philips
X-ray lithography
Photolithography
Electron-beam lithography
Electronic engineering
Computational lithography
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A Submicron Lithography Process Using Philips I-Line Stepper
1988
Guido van der Looij
Venkat Raman Nagaswami
Peter Baltussen
Peter Hartog
Rene Vervoordeldonk
Joost Moonen
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