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D. T. Tuenge
D. T. Tuenge
Dopant
Very-large-scale integration
Integrated circuit
Analytical chemistry
Chemistry
1
Papers
9
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Characterization of VLSI materials
1983
Journal of Vacuum Science and Technology
G. E. McGuire
L.B. Church
D. L. Jones
K. K. Smith
D. T. Tuenge
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Citations (9)
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