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Lee Y
Lee Y
University of Freiburg
Microelectrode
Electrode
Wafer
Deep reactive-ion etching
Wafer bonding
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Intracortical probe arrays with silicon backbone and microelectrodes on thin polyimide wings enable long-term stable recordings in vivo
2021
bioRxiv
Antje Kilias
Lee Y
Ulrich P. Froriep
D. Moser
Tobias Holzhammer
Ulrich Egert
Weileun Fang
Oliver Paul
Patrick Ruther
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