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Yusaku Ueda

Kagawa University

5

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Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite

2020 Journal of Micromechanics and Microengineering
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E-1-1 感光性ナノコンポジットを用いた磁気駆動型マイクロポンプの開発(マイクロナノメカトロニクス(1),口頭発表)

2013
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Improvement of processing reproducibility for a magnetic-driven microstructure made of photosensitive nanocomposite

2012 OMN | International Conference on Optical MEMS and Nanophotonics
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