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Nidhi Gupta
Nidhi Gupta
Solid State Physics Laboratory
Materials science
Microelectromechanical systems
Thin film
Composite material
Accelerometer
3
Papers
22
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Growth, structural and electrical properties of AlN/Si (111) for futuristic MEMS applications
2020
Materials Science in Semiconductor Processing
Akhilesh Pandey
Shankar Dutta
Janesh K Kaushik
Nidhi Gupta
Garima Guptar
R. Raman
Davinder Kaur
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Citations (1)
Influence of residual stress on performance of AlN thin film based piezoelectric MEMS accelerometer structure
2019
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
Nidhi Gupta
Akhilesh Pandey
Siva Rama Krishna Vanjari
Shankar Dutta
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Citations (13)
Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure
2019
Journal of Materials Science: Materials in Electronics
Nidhi Gupta
Shankar Dutta
Abha Panchal
Isha Yadav
Surender Kumar
Yashoda Parmar
Siva Rama Krishna Vanjari
K. K. Jain
D.K. Bhattacharya
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Citations (8)
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