Old Web
English
Sign In
Acemap
>
authorDetail
>
Doo Hyun Cho
Doo Hyun Cho
Inha University
Spectroscopy
Analytical chemistry
Thin film
Plasma
Dry etching
1
Papers
2
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Dry etching of palladium thin films in high density plasmas of CH3OH/Ar, C2H5OH/Ar, CH4/Ar, and CH4/O2/Ar gas mixtures
2017
Thin Solid Films
Jae Yong Lee
Jae Sang Choi
Doo Hyun Cho
Su Min Hwang
Chee Won Chung
Show All
Source
Cite
Save
Citations (2)
1