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Owndi Ongayi
Owndi Ongayi
Reflectivity
Process window
Resist
Surface finish
Optics
1
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Advances in Low Diffusion EUV Resists
2012
Journal of Photopolymer Science and Technology
James W. Thackeray
James F. Cameron
Michael Wagner
Suzanne Coley
Vipu Paul Labeaume
Owndi Ongayi
Warren Montgomery
Dave Lovell
John J. Biafore
Vidhya Chakrapane
Akiteru Ko
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Citations (7)
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