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H. Kuisma
H. Kuisma
Surface micromachining
Capacitive sensing
Engineering
Mechanical resonance
Resonance
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18
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A bulk micromachined silicon angular rate sensor
1997
Sensors
H. Kuisma
Tapani Ryhänen
Juha Lahdenperä
E. Punkka
S Ruotsalainen
T. Sillanpaa
Heikki Seppä
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Citations (18)
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