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Munehiro Kagaya
Munehiro Kagaya
Optoelectronics
substrate
Trench
Materials science
Atomic layer deposition
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2024
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Invited) Evaluation of Chemical and Physical Conformality for SiN x Films Deposited on Trench Substrate By Atomic Layer Deposition
2021
Atsushi Ogura
Ryo Yokogawa
Tappei Nishihara
Yuji Otsuki
Munehiro Kagaya
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