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T. Kobayashi

Tsuyama National College of Technology

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Method for Simulating the Thickness Distribution of a Cubic Boron Nitride Film Deposited on a Curved Substrate using Ion-beam-assisted Vapor Deposition

2012 Physics Procedia
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OS13-2-1 Measurement of Residual Stress in BN Films Prepared by Dual Ion Beam Sputtering Method

2011
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