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P. Haltebourg
P. Haltebourg
DSM
Optics
Chemistry
Plasma
Lithography
Modular design
2
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Développement d'une source EUV plasma laser pour la micro-lithographie
2003
Journal De Physique Iv
Marc Segers
M. Bougeard
E. Caprin
T. Ceccotti
F. Chichmanian
D. Descamps
P. Haltebourg
J.-F. Hergott
S. Hulin
D. Normand
M. Schmidt
O. Sublemontier
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PREUVE and the EXULITE project: modular laser-produced plasma EUV source
2002
Tiberio Ceccotti
F. Chichmanian
Dominique Descamps
P. Haltebourg
Jean-Francois Hergott
S. Hulin
D. Normand
Marc Segers
Olivier Sublemontier
M. Schmidt
Philippe Cormont
Michel Neu
Pierre-Yves Thro
Jean-Marc Weulersse
Benoit Barthod
R. Bernard
E. Veran
Jean-Marie Barbiche
Ph. D'Aux
E. Marquis
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