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Noel Sun
Noel Sun
Lam Research
Etching
Extreme ultraviolet lithography
Optoelectronics
high selectivity
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Plasma etch solutions for EUV patterning: defect challenges
2021
Noel Sun
Ansari Naveed
Ratndeep Srivastava
Yoshie Kimura
Gowri Kamarthy
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