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Ruling Chen

Shanghai University

22

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340

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Preparation of cobalt-doped colloidal silica abrasives and their chemical mechanical polishing performances on sapphire

2015 Micro & Nano Letters
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Preparation of Fe-doped colloidal SiO 2 abrasives and their chemical mechanical polishing behavior on sapphire substrates

2015 Applied Optics
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Influence of Zn (II) ion on abrasive-free polishing of hard disk substrate

2014 Thin Solid Films
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Study of material removal processes of the crystal silicon substrate covered by an oxide film under a silica cluster impact: Molecular dynamics simulation

2014 Applied Surface Science
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Preparation of porous alumina abrasives and their chemical mechanical polishing behavior

2012 Thin Solid Films
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Preparation of porous Fe2O3/SiO2 nanocomposite abrasives and their chemical mechanical polishing behaviors on hard disk substrates

2012 Thin Solid Films
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Comparison of surface damage under the dry and wet impact: Molecular dynamics simulation

2011 Applied Surface Science
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Dynamic phase transformation of crystalline silicon under the dry and wet impact studied by molecular dynamics simulation

2010 Journal of Applied Physics
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Chemical mechanical polishing of hard disk substrate with α-alumina-g-polystyrene sulfonic acid composite abrasive

2010 Thin Solid Films
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Surface Damages on Silicon Surfaces Created by Large Silica Cluster Impacts: Molecular Dynamics Simulation

2009
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