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Maggie Ma
Maggie Ma
ASML Holding
Experimental data
Chip
Shrinkage
Lithography
Computational lithography
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A physical resist shrinkage model for full-chip lithography simulations
2016
Proceedings of SPIE
Peng Liu
Leiwu Zheng
Maggie Ma
Qian Zhao
Yongfa Fan
Qiang Zhang
Mu Feng
Xin Guo
Thomas Wallow
Keith Gronlund
Ronald Goossens
Gary Zhang
Yen-Wen Lu
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