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Takenobu Kishida
Takenobu Kishida
Panasonic
Metallurgy
Materials science
Tin
Grain growth
Dielectric
2
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3
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High-performance metal hard mask process using novel TiN film for 32-nm node Cu interconnect and beyond
2011
IITC | International Interconnect Technology Conference
Naoki Torazawa
Toru Hinomura
Takeshi Harada
Tatsuya Kabe
Daisuke Inagaki
Yasunori Morinaga
Junichi Shibata
Takushi Shigetoshi
Shunsuke Hazue
Dai Motojima
Susumu Matsumoto
Takenobu Kishida
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Low resistance W-contact for 32-nm node devices and beyond
2010
IITC | International Interconnect Technology Conference
Toru Hinomura
Atsushi Nishimura
Masahiro Joei
Hirofumi Ohnaka
Hiroki Miyajima
Takenobu Kishida
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