Old Web
English
Sign In
Acemap
>
authorDetail
>
Hiroshi Tokumoto
Hiroshi Tokumoto
National Institute of Advanced Industrial Science and Technology
Chemistry
Plasma
Analytical chemistry
Spectroscopy
Laser-induced fluorescence
1
Papers
2
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Laser induced fluorescence monitoring of the etching processes with the inward plasma
2015
Vacuum
Jun Miyawaki
Toshitaka Kubo
Atsushi Ando
Satoshi Takahashi
Shun'ichiro Shimbori
Hiroshi Tokumoto
Tetsuo Shimizu
Show All
Source
Cite
Save
Citations (2)
1