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Zheng Chen
Zheng Chen
IBM
Lithography
Resist
Optics
Materials science
Electronic engineering
3
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3
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0
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When is bilayer thin-film imaging suitable: comparison with single-layer resists
2001
Scott Halle
Alan C. Thomas
Michael D. Armacost
Timothy J. Dalton
Xiaochun Chen
Scott J. Bukofsky
Oliver Genz
Zhijian G. Lu
Shahid Butt
Zheng Chen
Richard A. Ferguson
Eric M. Coker
Robert K. Leidy
Qinghuang Lin
Arpan P. Mahorowala
Katherina Babich
Karen Petrillo
Marie Angelopoulos
Mark Ignatowicz
Bang Bui
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Image shortening and process development in BEOL lithography
2000
Ronald A. DellaGuardia
Dennis J. Warner
Zheng Chen
Martin Stetter
Richard A. Ferguson
Anne McGuire
Karen D. Badger
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X-ray Mask Defect Repair Optimization
1999
Zheng Chen
Steven C. Nash
Azalia A. Krasnoperova
Chet Wasik
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