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M.K. Abatchev
M.K. Abatchev
Atomic physics
Dry etching
Particle
Dielectric
Experimental data
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Effect of the local charging on the dielectric materials etching rate
1996
ICOPS | International Conference on Plasma Science
A. Shibkov
M.K. Abatchev
H.K. Kang
C.O. Jung
Myunghee Lee
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