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Norifumi Fujikawa
Norifumi Fujikawa
Osaka Prefecture University
Polystyrene
Optics
X-ray lithography
Lithography
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Strength enhancement of nano patterns from edge lithography for nanoimprint mold
2012
Microelectronic Engineering
Junji Sakamoto
Hayato Noma
Norifumi Fujikawa
Hiroaki Kawata
Masaaki Yasuda
Yoshihiko Hirai
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Citations (4)
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