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Kathleen A. Perry
Kathleen A. Perry
Motorola
Electronic engineering
Static random-access memory
BiCMOS
Copper
Materials science
3
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Copper metallization for on-chip interconnects
1996
Avgerinos V. Gelatos
Bich Yen Nguyen
Kathleen A. Perry
R. Marsh
J. Peschke
Stanley M. Filipiak
Edward O. Travis
Matthew A. Thompson
T. Saaranen
Phil Tobin
C. J. Mogab
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Copper integration into 0.5 /spl mu/m BiCMOS technology
1995
VLSIT | Symposium on VLSI Technology
A.V. Gelatos
Bich Yen Nguyen
Kathleen A. Perry
R. Marsh
J. Peschke
Stanley M. Filipiak
Edward O. Travis
Navakanta Bhat
L.B. La
Matthew A. Thompson
T. Saaranen
Phil Tobin
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Planarization using chemical mechanical planarization (CMP) on a 16-megabit SRAM with quadruple polysilicon stacks
1994
Kathleen A. Perry
Sandya Radhakrishna
Craig S. Lage
Franklin Nkansah
Victor Pol
Thom Kobayashi
Jeff P. West
Phil E. Crabtree
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