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Carsten Underbjerg
Carsten Underbjerg
Electronic engineering
Surface micromachining
Short circuit
Shutter
Stiction
2
Papers
2
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0
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Arrays of addressable contactless optical microshutters
2005
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
Stephan Gonseth
Gregoire Perregaux
Roberto Frosio
Jean-Philippe Thiébaud
Henri Vuillomenet
Patrick Debergh
Carsten Underbjerg
Tue Ravnkilde
Henning Henningsen
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Omskifterindrening, in particular for use in optics
2002
Carsten Underbjerg
Claude Bourgeois
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