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S. Golka
S. Golka
Chemistry
Optics
Analytical chemistry
Materials science
Nuclear magnetic resonance
5
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23
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Time-multiplexed, inductively coupled plasma process with separate SiCl4 and O2 steps for etching of GaAs with high selectivity
2009
Journal of Vacuum Science & Technology B
S. Golka
M. Arens
M. Reetz
T. Kwapien
S. Bouchoule
G. Patriarche
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Citations (10)
Electro-optical intersubband applications an modulators at telecommunication wavelengths based on GaN/AlN quantum wells
2008
Physica Status Solidi A-applications and Materials Science
N. Kheirodin
L. Nevou
H. Machhadani
M. Tchernycheva
Anatole Lupu
F. H. Julien
P. Crozat
L. Meignien
E. Warde
Laurent Vivien
G. Pozzovivo
S. Golka
G. Strasser
F. Guillot
E. Monroy
T. Remmele
M. Albrecht
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Advanced nanopattern formation by a subtractive self-organization process with focused ion beams
2006
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
Alois Lugstein
B. Basner
W. Brezna
Matthias Weil
S. Golka
Emmerich Bertagnolli
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Processing of deeply etched GaAs/AlGaAs quantum cascade lasers with grating structures
2004
MRS Proceedings
S. Golka
M. Austerer
C. Pflügl
W. Schrenk
G. Strasser
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Useful and cost efficient fabrication of dot arrays for photonic crystals by direct write electron-beam lithography
2003
Microelectronic Engineering
R. Steingrüber
S. Golka
H. Heidrich
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Citations (9)
1