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WeiliLiu
WeiliLiu
Band gap
Silicon carbide
Electron mobility
Optoelectronics
Wafer
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Mechanism Analysis of Chemical Mechanical Polishing of 4H-SiC Wafer
2020
CSTIC | China Semiconductor Technology International Conference
Gaoyang Zhao
Aoxue Xu
Fan Xu
Daohuan Feng
WeiliLiu
Zhitang Song
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