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Jeff Maxson
Jeff Maxson
IBM
Engineering
Electronic engineering
Electrical engineering
Sputtering
Silicon on insulator
2
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2024
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Improving Yields of High Performance 65 nm Chips with Sputtering Top Surface of Dual Stress Liner
2007
VLSIT | Symposium on VLSI Technology
Huilong Zhu
Daewon Yang
Mahender Kumar
John Z. Colt
Jeff Maxson
Frederick A. Scholl
Derek Chen
Deb Leach
Effendi Leobandung
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Production of atomic nitrogen from NH 3 using an rf atomic nitrogen plasma source
2000
Bryan M. Barnes
Jeff Maxson
Arthur R. Woll
Max G. Lagally
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