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G. Wortberg
G. Wortberg
RWTH Aachen University
Thin film
Transition metal
Boundary layer
Impurity
Laser-induced fluorescence
1
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Experimental and theoretical investigations of low-pressure CVD of Cu using CuI as precursor
1997
Journal of Crystal Growth
A. Möller
R. Kall
V. Till
G. Wortberg
G. Adomeit
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Citations (6)
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