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Jeon Sanghuck
Jeon Sanghuck
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Computer science
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Optics
Metrology
4
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2
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OPO residuals reduction with imaging metrology color per layer mode
2020
Shlomit Katz
Honggoo Lee
Dongyoung Lee
Jin-Soo Kim
Jaesun Woo
Chunsoo Kang
Chanha Park
Dohwa Lee
Seongjae Lee
Jeon Sanghuck
Dongsub Choi
Anna Golotsvan
Roie Volkivich
Efi Megged
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CD均一性改善のためのクリーンフォーカス,線量およびCD計測【JST・京大機械翻訳】
2018
Lee Honggoo
Han SangJun
Hong Minhyung
Kim Seungyoung
Lee Jieun
Lee Dongyoung
Oh Eungryong
Choi Ahlin
Kim Nakyoon
C Robinson John
Mengel Markus
Pablo Rovira
Yoo Sungchul
Getin Raphael
Choi Dong-Sub
Jeon Sanghuck
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Patterned Wafer Geometry Grouping for Improved Overlay Control
2017
Lee Honggoo
Han SangJun
Woo Jaeson
Park Junbeom
Song Changrock
Anis Fatima
Vukkadala Pradeep
Jeon Sanghuck
Choi Dong-Sub
Huang Kevin
Heo Hoyoung
Smith Mark D
C Robinson John
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Application of Overlay Modeling and Control with Zernike Polynomials in an HVM Environment
2016
JU JawWuk
KiM Mingyu
Lee Juhan
Nabeth Jeremy
Jeon Sanghuck
Heo Hoyoung
C Robinson John
Pierson Bill
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