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Satoru Masbuchi
Satoru Masbuchi
Etching (microfabrication)
Plasma
Materials science
high pressure
Graphene
2
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Selective etching of h -BN using high-pressure CF 4 plasma to fabricate graphene devices
2021
The Japan Society of Applied Physics
Yuta Seo
Satoru Masbuchi
Eisuke Watanabe
Momoko Onodera
Rai Moriya
Kenji Watanabe
Takashi Taniguchi
Tomoki Machida
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Selective etching of h -BN using high-pressure CF 4 plasma to fabricate graphene devices
2021
The Japan Society of Applied Physics
Yuta Seo
Satoru Masbuchi
Eisuke Watanabe
Momoko Onodera
Rai Moriya
Kenji Watanabe
Takashi Taniguchi
Tomoki Machida
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Citations (0)
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