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Martin Mitzschke
Martin Mitzschke
Leibniz Association
Scanning electron microscope
Polymer
Ion
range
Photoresist
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Ion incidence angle dependent pattern formation at AZ 4562® photo resist by Ar+ ion beam erosion
2022
Applied Surface Science
Tom Rüdiger
Martin Mitzschke
Andrea Prager
Ying Liu
Bernd Abel
Agnes Schulze
Frank Frost
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