Old Web
English
Sign In
Acemap
>
authorDetail
>
Josef Mathuni
Josef Mathuni
Optoelectronics
Resist
Materials science
LIGA
Remote plasma
2
Papers
18
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Device and method of manufacturing micro-components and use of such a device
2008
Josef Mathuni
Show All
Source
Cite
Save
Citations (0)
Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique
2008
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems
Rainer Engelke
Josef Mathuni
Gisela Ahrens
Gabi Gruetzner
Martin Bednarzik
Daniel Schondelmaier
Bernd Loechel
Show All
Source
Cite
Save
Citations (18)
1