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Robert E. Gleason
Robert E. Gleason
Hewlett-Packard
Optics
Engineering
Lithography
Proximity effect (audio)
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5
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23
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100-nm CMOS gates patterned with 3 sigma below 10 nm
1998
Hua-yu Liu
Carlos H. Diaz
Chiu Chi
R. Kavari
Peng Cheng
Min Cao
Robert E. Gleason
Brian S. Doyle
Wayne Greene
Gary W Ray
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Citations (2)
Impact of photomasks on linewidth variation
1997
Robert E. Gleason
Hua-yu Liu
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Contributions of stepper lenses to systematic CD errors within exposure fields
1995
Hua-yu Liu
Crid Yu
Robert E. Gleason
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Quantifying proximity and related effects in advanced wafer processes
1995
John P. Stirniman
Michael L. Rieger
Robert E. Gleason
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Fabrication of 0.1-um T-shaped gates by phase-shifting optical lithography
1993
Hua-yu Liu
Chung–Yi Su
Nigel R. Farrar
Robert E. Gleason
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Citations (6)
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