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A. N. Shatohin
A. N. Shatohin
Moscow State University
Chemistry
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Vacuum chamber
Thin film
Oxygen
1
Papers
20
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Pulsed laser deposition of ITO thin films and their characteristics
2012
Semiconductors
D. A. Zuev
A. A. Lotin
O. A. Novodvorsky
F.V. Lebedev
O. D. Khramova
I. A. Petuhov
Ph. N. Putilin
A. N. Shatohin
M. N. Rumyanzeva
A. M. Gaskov
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Citations (20)
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