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Ruiheng Yan
Ruiheng Yan
Microstructure
Slurry
Inorganic chemistry
Chemistry
micro damage
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A Research of the Micro-Damage of the Backside TSV Heterogeneous Microstructure after CMP Process with Alkaline Slurry
2018
ECS Journal of Solid State Science and Technology
Bingquan Wang
Yuhong Liu
Jie Cheng
Ruiheng Yan
Xinchun Lu
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