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M. Tesauro
M. Tesauro
Qimonda
Resist
Analytical chemistry
Optics
Scanning electron microscope
Photoresist
2
Papers
3
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Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
2009
Katja Keil
Philipp Jaschinsky
C. Hohle
K.-H. Choi
R. Schneider
M. Tesauro
F. Thrum
Roy Zimmermann
Johannes Kretz
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Citations (2)
CD control of direct versus complementary exposure for shaped beam writers and its correlation to the local registration error
2007
Microelectronic Engineering
F. Thrum
K.-H. Choi
T. Lutz
C. Hohle
C. Arndt
M. Tesauro
M.-T. Bootsmann
Johannes Kretz
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