First Stacked Ge 0.88 Sn 0.12 pGAAFETs with Cap, LG=4Onm, Compressive Strain of 3.3%, and High S/D Doping by CVD Epitaxy Featuring Record ION of 58μA at V OV =V DS = -0.5V, Record G m,max of 172μS at V DS = -0.5V, and Low Noise
2019
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