Highly Reproducible Large‐Area Perovskite Solar Cell Fabrication via Continuous Megasonic Spray Coating of CH3NH3PbI3

: A simple, low-cost, large area, and continuous scalable coating method is proposed for the fabrication of hybrid organic-inorganic perovskite solar cells. A megasonic spray-coating method utilizing a 1.7 MHz megasonic nebulizer that could fabricate reproducible large-area planar efficient perovskite films is developed. The coating method fabricates uniform large-area perovskite film with large-sized grain since smaller and narrower sized mist droplets than those generated by existing ultrasonic spray methods could be generated by megasonic spraying. The volume flow rate of the CH3 NH3 PbI3 precursor solution and the reaction temperature are controlled, to obtain a high quality perovskite active layer. The devices reach a maximum efficiency of 16.9%, with an average efficiency of 16.4% from 21 samples. The applicability of megasonic spray coating to the fabrication of large-area solar cells (1 cm2 ), with a power conversion efficiency of 14.2%, is also demonstrated. This is a record high efficiency for large-area perovskite solar cells fabricated by continuous spray coating.