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Local Arrangement of Substitutional C Atoms and the Thermal Stability of Epitaxial Si:C(P) Grown by CVD
Local Arrangement of Substitutional C Atoms and the Thermal Stability of Epitaxial Si:C(P) Grown by CVD
2017
Sathish Kumar Dhayalan
Thomas Nuytten
Roger Loo
Erik Rosseel
Andriy Hikavyy
Yosuke Shimura
Wilfried Vandervorst
Keywords:
Epitaxy
Thermal stability
Atom
Inorganic chemistry
Chemistry
Crystallography
Correction
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