Fabrication of probes for scanning near-field optical microscopy using focused ion beam

The results of an experimental study of the fabrication of probe tips for scanning near-field optical microscopy (SNOM) using the focused ion beam (FIB) milling and ion beam induced deposition are presented. Methods of the FIB local milling and FIB-induced deposition of tungsten and carbon onto the tip of an atomic force microscope (AFM) probe are studied. In this work, a technique for the formation of AFM probes based on the use of a combination of ion-beam etching and ion-induced carbon deposition was developed. Based on the developed technique, several aperture probes for SNOM with an aperture diameter of 50, 150, and 200 nm, an apex height of about 20 nm, and a cone angle of about 35° were fabricated. The paper presents that the formation of SNOM probes by FIB-induced deposition allows creating a high efficiency tool for nanodiagnostics. The obtained results can be used to develop technological processes for the fabrication of specialized AFM probes and procedures for the express monitoring of technological process parameters in the manufacturing of the elements for micro- and nanoelectronics.