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Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance
Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance
2015
Kurt Wostyn
Dirk Rondas
Roger Loo
Sathish Kumar Dhayalan
Andriy Hikavyy
Wim Elskens
Alex Vyncke
Paul Mertens
Frank Holsteyns
Stefan De Gendt
Toru Masaoka
Yukifumi Yoshida
Gerhard Bast
Gavin Simpson
Keywords:
Environmental chemistry
Materials science
Water quality
Waste management
In situ
Environmental science
Correction
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