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Toru Masaoka
Toru Masaoka
Kurita Water Industries Ltd.
Materials science
Inorganic chemistry
Hydrogen peroxide
Dissolution
Sulfuric acid
4
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1
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0
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Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer
2018
Solid State Phenomena
Hideaki Iino
Yuichi Ogawa
Toru Masaoka
Quoc Toan Le
Els Kesters
Jens Rip
Yusuke Oniki
Yuya Akanishi
Akihisa Iwasaki
Frank Holsteyns
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Effect of Dilute Hydrogen Peroxide in Ultrapure Water on SiGe Epitaxial Process
2016
Solid State Phenomena
Toru Masaoka
Nobuko Gan
Yu Fujimura
Yuichi Ogawa
Kurt Wostyn
Antoine Pacco
Yukifumi Yoshida
Frank Holsteyns
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Dissolution of Germanium in Sulfuric Acid Based Solutions
2015
Nobuko Gan
Yuichi Ogawa
Tatsuo Nagai
Toru Masaoka
Kurt Wostyn
Farid Sebaai
Frank Holsteyns
Paul Mertens
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Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance
2015
Kurt Wostyn
Dirk Rondas
Roger Loo
Sathish Kumar Dhayalan
Andriy Hikavyy
Wim Elskens
Alex Vyncke
Paul Mertens
Frank Holsteyns
Stefan De Gendt
Toru Masaoka
Yukifumi Yoshida
Gerhard Bast
Gavin Simpson
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