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Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer
Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer
2018
Hideaki Iino
Yuichi Ogawa
Toru Masaoka
Quoc Toan Le
Els Kesters
Jens Rip
Yusuke Oniki
Yuya Akanishi
Akihisa Iwasaki
Frank Holsteyns
Keywords:
Hydrogen peroxide
Metallurgy
Cobalt
Materials science
Inorganic chemistry
Compatibility (mechanics)
Chemical engineering
Correction
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