Parameter extraction for tunable TFBARs based on Ba x Sr 1−x TiO 3

A model and a robust extraction procedure for tunable thin-film bulk acoustic resonators (TFBARs) are proposed. The TFBARs are based on induced piezoelectricity in Ba x Sr 1−x TiO 3 films. Their tunable characteristics as represented by the extracted model parameters are interpreted and discussed.