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Characterization of Ultra Thin Layers by Rutherford Backscattering Spectrometry
Characterization of Ultra Thin Layers by Rutherford Backscattering Spectrometry
1999
Bert Brijs
Jeroen Deleu
T. Connard
Hua Li
R. Loo
M. Caymax
Kaoru Nakajima
Kenji Kimura
W. Vandervorst
Keywords:
Rutherford backscattering spectrometry
Materials science
Thin layers
Analytical chemistry
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