Evaluation of Narrow Gap Filling Ability in Shallow Trench Isolation by Organosiloxane Sol-Gel Precursor

Kohei Watanuki, Atsutoshi Inokuchi, Akinori Banba, Nobuyuki Manabe, Hirokazu Suzuki, Tadashi Koike, Tatsuhiko Adachi, Tetsuya Goto, Akinobu Teramoto, Yasuyuki Shirai, Shigetoshi Sugawa and Tadahiro Ohmi 1 New Industry Creation Hatchery Center, Tohoku University, Aza-Aoba 6-6-10, Aramaki, Aobaku, Sendai 980-8579, Japan 2 Ube-nittou kasei co., ltd., 2-1-1 Yabutanishi Gifu 5008386 Japan 3 Graduate School of Engineering, Tohoku University, Aza-Aoba 6-6-11, Aramaki, Aobaku, Sendai 980-8579, Japan 4 WPI Research Center Aza-Aoba 6-6-10, Aramaki, Aobaku, Sendai 980-8579, Japan