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Akinori Banba
Akinori Banba
Tohoku University
Sol-gel
Polymer science
Shallow trench isolation
Materials science
Chromatography
2
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2
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Electrical Properties of Metal-Oxide-Containing SiO2 Films Formed by Organosiloxane Sol–Gel Precursor
2010
Japanese Journal of Applied Physics
Kohei Watanuki
Atsutoshi Inokuchi
Akinori Banba
Hirokazu Suzuki
Tadashi Koike
Tatsuhiko Adachi
Tetsuya Goto
Akinobu Teramoto
Yasuyuki Shirai
Shigetoshi Sugawa
Tadahiro Ohmi
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Evaluation of Narrow Gap Filling Ability in Shallow Trench Isolation by Organosiloxane Sol-Gel Precursor
2010
Kohei Watanuki
Atsutoshi Inokuchi
Akinori Banba
Nobuyuki Manabe
Hirokazu Suzuki
Tadashi Koike
Tastuhiko Adachi
Tetsuya Goto
Akinobu Teramoto
Yasuyuki Shirai
Shigetoshi Sugawa
Tadahiro Ohmi
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Citations (1)
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