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Preparation of Sn doped SiO2 films using SiO2 and SnO2 mixture powder target by magnetron sputtering deposition
Preparation of Sn doped SiO2 films using SiO2 and SnO2 mixture powder target by magnetron sputtering deposition
2017
Hiroharu Kawasaki
Takeshi Ohshima
Yoshihito Yagyu
Takeshi Ihara
Yoshiaki Suda
Keywords:
Sputter deposition
Doping
Ceramic materials
Inorganic chemistry
Materials science
Chemical engineering
Deposition (law)
Correction
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